Georgia
Institute of Technology
Prof. John Papapolymerou’s research interests include the implementation
of micromachining techniques and MEMS devices in microwave, millimeter-wave
and THz circuits and the devel-opment of both passive and active planar
circuits on semiconductor (Si/SiGe, GaAs) and organic substrates (LCP,
LTCC) for System-on-a-Chip (SOC)/ System-on-a-Package (SOP) RF front ends.
His team at Georgia Tech has extensively investigated dielectric charging
effects of capaci-tive MEMS switches with SiNx as the dielectric layer
under induced voltage stress. They have also developed several RF MEMS
based circuits on both silicon and organic (LCP) substrates for System-on-a-Chip
(SOC) and System-on-a-Package (SOP) type of RF front ends. Prof. Papa-polymerou’s
awards include the 2004 Army Research Office (ARO) Young Investigator
Award and the 2002 National Science Foundation (NSF) CAREER award.
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