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Saturday, February 25, 2017  
Lehigh University  

Lehigh University has one of the largest (15) collections of electron microscopes in academia. A specially developed sample stage is available for mechanical testing at the nanometer scale in situ a scanning electron microscope or a transmission electron microscope. A custom-developed nano-indentor and resonance tester will be used to characterize planar and non-planar structures. Other materials characterization techniques such as atomic-force microscopy, focused ion-beam etching, x-ray diffraction, x-ray photoelectric spectroscopy, etc. are also available. Lehigh University also has one of the best RF device testing laboratories with three state-of-the-art probe stations. One of the probe stations in the laboratory is capable of femtoampere current measurement under controlled gas ambient and temperature (-65 to 200?C). This probe station has been successfully used to directly measure charging and discharging currents of the dielectrics in RF MEMS switches.


















IMPACT Center for Advancement of MEMS/NEMS VLSI. University of Illinois at Urbana-Champaign
Beckman Institute. 405 North Mathews Avenue. Urbana, IL 61801 USA
+1 (217) 265.8435; info at mems-vlsi.ece.uiuc.edu
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