Lehigh University has one of the largest
(15) collections of electron microscopes in academia. A specially developed
sample stage is available for mechanical testing at the nanometer scale
in situ a scanning electron microscope or a transmission electron microscope.
A custom-developed nano-indentor and resonance tester will be used to
characterize planar and non-planar structures. Other materials characterization
techniques such as atomic-force microscopy, focused ion-beam etching,
x-ray diffraction, x-ray photoelectric spectroscopy, etc. are also available.
Lehigh University also has one of the best RF device testing laboratories
with three state-of-the-art probe stations. One of the probe stations
in the laboratory is capable of femtoampere current measurement under
controlled gas ambient and temperature (-65 to 200?C). This probe station
has been successfully used to directly measure charging and discharging
currents of the dielectrics in RF MEMS switches.