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Sunday, September 24, 2017  
Thrust 1: Physics of Failure of Contacting MEMs Devices  


  1. Develop an improved understanding of fundamental science governing the operation of MEMs/NEMs devices which make contact.
  2. Implement this understanding into physics-based models that emulate the underlying principles and allow for extrapolation of performance and lifetime improvements.
  3. Validate both the physics and resulting models with test structures and actual switches.






IMPACT Center for Advancement of MEMS/NEMS VLSI. University of Illinois at Urbana-Champaign
Beckman Institute. 405 North Mathews Avenue. Urbana, IL 61801 USA
+1 (217) 265.8435; info at mems-vlsi.ece.uiuc.edu
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