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Sunday, June 16, 2024  

MEMS enabled microsystems have demonstrated the potential to revolutionize the architecture of modern communications, sensors, and signal processing systems. To date, their exploitation in commercial and military capabilities has been hindered by the lack of understanding of the fundamental multi-physics phenomena that govern MEMS device functionality and impact its performance degradation, especially when subjected to operating conditions imposed by the heterogeneous, integrating microsystems environment.

In order to address this requirement, The University of Illinois at Urbana-Champaign , Purdue University, The Georgia Institute of Technology, Lehigh University, MEMtronics and their affiliated industrial partners have teamed up to propose an aggressive and innovative fundamental and applied research effort through the establishment of the DARPA IMPACT Center for Advancement of MEMS/NEMS VLSI.

The mission and objectives of the proposed Center are:

• To develop and enhance the understanding of experimentally observed, fundamental principles and processes governing MEMS/NEMS performance

• To develop experiments and demonstrate validated multi-physics/multi-scale models to describe the thermoelectromechanical and fluidic interrelations and their impact on MEMS/NEMS device operation and performance

• To experimentally demonstrate validated lifetime predictive models for reliable device designs and system designs

• To demonstrate order reduced models and parameter extraction procedures for complex but realistic system level designs

• To demonstrate innovative design methodologies with hardware fabrication that take into consideration multi-physics/multi-scale physical principles and apply them to the design of reliable largescale integrated MEMS/NEMS based Microsystems

The ultimate goal is to develop the physics based knowledge needed to enhance the lifetime performance and functionality of highly integrated MEMS/NEMS based micro and nanosystems, and proliferate their insertion in military and commercial applications.

IMPACT Center for Advancement of MEMS/NEMS VLSI. University of Illinois at Urbana-Champaign
Beckman Institute. 405 North Mathews Avenue. Urbana, IL 61801 USA
+1 (217) 265.8435; info at mems-vlsi.ece.uiuc.edu
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